A National Science Foundation funded
Regional Advanced Technology Education Center
in Albuquerque, New Mexico



Instructors – Would you like to learn more about microsystems (MEMS) applications, fabrication, cleanroom safety and BioMEMS?

Would you like to sample free Learning Modules (SCOs) that
you can use in your classroom?

CLICK HERE to view samples of Learning Modules
you can request from SCME.

Micro Electro Mechanical Systems (MEMS)
What are MEMS and BioMEMs?

See "What Are MEMS?" video - CLICK HERE

MEMS: Microelectromechanical systems. A term primarily used in the United States, it refers to machines with moving parts smaller than a human hair that contain electrical, mechanical and optical components made of silicon and other materials. Also referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics.- Small Times Glossary
BioMEMS: Miniaturization engineering or MEMS applied to biotechnology or medicine. In BioMEMS the number of materials involved is much larger than in a comparable electronics application. Both instruments and sensors are used in BioMEMS. Applications include: Forensic science (DNA); Clinical diagnostics (e.g. glucose in blood); Product development (e.g. new drug); and Quality control (e.g. pH of swimming pools).- NanoMicroClub.com
Though dwarfed by a penny, the tiny device shown magnified here is a fully functioning oscillator used to study the effect of magnetic fields on materials. The oscillator, created at Lucent Technologies' Bell Labs, measures about a hair's thickness in length and half that distance in width -- or roughly 0.004 inches by 0.002 inches.
Fiber-optic microelectromechanical system (MEMS) pressure sensor is designed for use in medical applications and in particular for making in-vivo catheter physiological measurements. FISO Technologies inc.
A DMD panel's micromirrors are mounted on tiny hinges that enable them to tilt either toward the light source in a DLP™ projection system (ON) or away from it (OFF)-creating a light or dark pixel on the projection surface
For the past 15 years, MEMS accelerometers have monitored the body's activity level in pacemakers and defibrillators. Major makers are Medtronic Inc. and Guidant Corp.